مؤتمر
Formation of Ultra Thin Soi-Layer by Implantation of Nitrogen
العنوان: | Formation of Ultra Thin Soi-Layer by Implantation of Nitrogen |
---|---|
المؤلفون: | Schork, R., Ryssel, H. |
المصدر: | 1992 IEEE International SOI Conference SOI conference SOI Conference, 1992. IEEE International. :16-17 1992 |
Relation: | IEEE International SOI Conference |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 0780307763 9780780307766 0780374398 9780780374393 |
---|---|
تدمد: | 1078621X |
DOI: | 10.1109/SOI.1992.664774 |