Monitoring virtual metrology reliability in a sampling decision system

التفاصيل البيبلوغرافية
العنوان: Monitoring virtual metrology reliability in a sampling decision system
المؤلفون: Kurz, Daniel, De Luca, Cristina, Pilz, Jurgen
المصدر: 2013 IEEE International Conference on Automation Science and Engineering (CASE) Automation Science and Engineering (CASE), 2013 IEEE International Conference on. :20-25 Aug, 2013
Relation: 2013 IEEE International Conference on Automation Science and Engineering (CASE 2013)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781479915156
تدمد:21618070
21618089
DOI:10.1109/CoASE.2013.6653949