Self-aligned contacts for 10nm FDSOI Node: From device to circuit evaluation

التفاصيل البيبلوغرافية
العنوان:	Self-aligned contacts for 10nm FDSOI Node: From device to circuit evaluation
المؤلفون:	Niebojewski, H., Le Royer, C., Morand, Y., Rozeau, O., Jaud, M.-A., Barnola, S., Arvet, C., Pradelles, J., Bustos, J., Pedini, J.M., Dubois, E., Faynot, O.
المصدر:	2013 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S) SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S), 2013 IEEE. :1-2 Oct, 2013
Relation:	2013 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S) (Formerly known as SOI Conference)
قاعدة البيانات:	IEEE Xplore Digital Library