دورية أكاديمية
Nanoscale Magnification and Shape Control System for Precision Overlay in Jet and Flash Imprint Lithography
العنوان: | Nanoscale Magnification and Shape Control System for Precision Overlay in Jet and Flash Imprint Lithography |
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المؤلفون: | Cherala, A., Schumaker, P., Mokaberi, B., Selinidis, K., Choi, B. J., Meissl, M. J., Khusnatdinov, N. N., LaBrake, D., Sreenivasan, S. V. |
المصدر: | IEEE/ASME Transactions on Mechatronics IEEE/ASME Trans. Mechatron. Mechatronics, IEEE/ASME Transactions on. 20(1):122-132 Feb, 2015 |
قاعدة البيانات: | IEEE Xplore Digital Library |
تدمد: | 10834435 1941014X |
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DOI: | 10.1109/TMECH.2013.2297679 |