Simulation of deflection and stress for MEMS pressure sensor based on graphene

التفاصيل البيبلوغرافية
العنوان: Simulation of deflection and stress for MEMS pressure sensor based on graphene
المؤلفون: Jiang, Shengwei, Wang, Xuefang, Shi, Shuai, Yuan, Jiaojiao, Fang, Jing, Gao, Can, Liu, Sheng
المصدر: 2013 14th International Conference on Electronic Packaging Technology Electronic Packaging Technology (ICEPT), 2013 14th International Conference on. :462-466 Aug, 2013
Relation: 2013 14th International Conference on Electronic Packaging Technology (ICEPT)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781479904983
DOI:10.1109/ICEPT.2013.6756513