التفاصيل البيبلوغرافية
العنوان: |
Simulation of deflection and stress for MEMS pressure sensor based on graphene |
المؤلفون: |
Jiang, Shengwei, Wang, Xuefang, Shi, Shuai, Yuan, Jiaojiao, Fang, Jing, Gao, Can, Liu, Sheng |
المصدر: |
2013 14th International Conference on Electronic Packaging Technology Electronic Packaging Technology (ICEPT), 2013 14th International Conference on. :462-466 Aug, 2013 |
Relation: |
2013 14th International Conference on Electronic Packaging Technology (ICEPT) |
قاعدة البيانات: |
IEEE Xplore Digital Library |