مؤتمر
Simulation of deflection and stress for MEMS pressure sensor based on graphene
العنوان: | Simulation of deflection and stress for MEMS pressure sensor based on graphene |
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المؤلفون: | Jiang, Shengwei, Wang, Xuefang, Shi, Shuai, Yuan, Jiaojiao, Fang, Jing, Gao, Can, Liu, Sheng |
المصدر: | 2013 14th International Conference on Electronic Packaging Technology Electronic Packaging Technology (ICEPT), 2013 14th International Conference on. :462-466 Aug, 2013 |
Relation: | 2013 14th International Conference on Electronic Packaging Technology (ICEPT) |
قاعدة البيانات: | IEEE Xplore Digital Library |
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