Multifunctional integrated sensor in A 2×2 mm epitaxial sealed chip operating in a wireless sensor node

التفاصيل البيبلوغرافية
العنوان:	Multifunctional integrated sensor in A 2×2 mm epitaxial sealed chip operating in a wireless sensor node
المؤلفون:	Roozeboom, C. L., Hong, V. A., Ahn, C. H., Ng, E. J., Yang, Y., Hill, B. E., Hopcroft, M. A., Pruitt, B. L.
المصدر:	2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on. :773-776 Jan, 2014
Relation:	2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)
قاعدة البيانات:	IEEE Xplore Digital Library