Very low power consumption MEMS scanner with alkali electret comb drive

التفاصيل البيبلوغرافية
العنوان:	Very low power consumption MEMS scanner with alkali electret comb drive
المؤلفون:	Sugiyama, Tatsuhiko, Aoyama, Mitsuru, Kawai, Keiko, Hashiguchi, Gen
المصدر:	2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on. :1229-1232 Jan, 2014
Relation:	2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)
قاعدة البيانات:	IEEE Xplore Digital Library