مؤتمر
Organosilicate glass dielectric films with backbone carbon: Enhanced resistance to carbon loss in plasma environments
| العنوان: | Organosilicate glass dielectric films with backbone carbon: Enhanced resistance to carbon loss in plasma environments |
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| المؤلفون: | Kazi, H., James, R., Gaddam, S., Chiluwal, U., Rimsza, J., Du, J., Kelber, J. |
| المصدر: | IEEE International Interconnect Technology Conference Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC), 2014 IEEE International. :237-240 May, 2014 |
| Relation: | 2014 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781479950164 9781479950188 |
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| تدمد: | 2380632X 23806338 |
| DOI: | 10.1109/IITC.2014.6831884 |