Contact module at dense gate pitch technology challenges

التفاصيل البيبلوغرافية
العنوان: Contact module at dense gate pitch technology challenges
المؤلفون: Demuynck, S., Mao, M., Kunnen, E., Versluijs, J., Croes, K., Wu, C., Schaekers, M., Peter, A., Kauerauf, T., Teugels, L., Bommels, J.
المصدر: IEEE International Interconnect Technology Conference Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC), 2014 IEEE International. :307-310 May, 2014
Relation: 2014 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781479950164
9781479950188
تدمد:2380632X
23806338
DOI:10.1109/IITC.2014.6831894