مؤتمر
Scanning frequency comb microscopy (SFCM): A new method showing promise for high-resolution carrier profiling in semiconductors
| العنوان: | Scanning frequency comb microscopy (SFCM): A new method showing promise for high-resolution carrier profiling in semiconductors |
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| المؤلفون: | Hagmann, Mark J., Andrei, Petru, Pandey, Shashank, Nahata, Ajay |
| المصدر: | 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014) Advanced Semiconductor Manufacturing Conference (ASMC), 2014 25th Annual SEMI. :213-218 May, 2014 |
| Relation: | 2014 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781479939442 |
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| تدمد: | 10788743 23766697 |
| DOI: | 10.1109/ASMC.2014.6847001 |