مؤتمر
Investigation of novel inspection capability for 3D NAND device wordline inspection
| العنوان: | Investigation of novel inspection capability for 3D NAND device wordline inspection |
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| المؤلفون: | Soon Kyu Lee, Seong-Min Ma, IlSeok Seo, Hyeon Sang Shin, Hyeon Soo Kim, Cross, Andrew, Baris, Oksen, DoOh Kim, Seung Hwan Lee, Lange, Steve |
| المصدر: | 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014) Advanced Semiconductor Manufacturing Conference (ASMC), 2014 25th Annual SEMI. :278-282 May, 2014 |
| Relation: | 2014 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781479939442 |
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| تدمد: | 10788743 23766697 |
| DOI: | 10.1109/ASMC.2014.6847021 |