Characterization and application of interconnect process parameters

التفاصيل البيبلوغرافية
العنوان: Characterization and application of interconnect process parameters
المؤلفون: Chou, A., Chang, K.-J., Mathews, R., Wong, K., Wang, T., Wei, Y.-H., Su, K.C., Hsue, P.
المصدر: ICMTS 1998. Proceedings of 1998 International Conference on Microelectronic Test Structures (Cat. No.98CH36157) Microelectronic test structures Microelectronic Test Structures, 1998. ICMTS 1998., Proceedings of the 1998 International Conference on. :189-191 1998
Relation: ICMTS 1998. Proceedings of 1998 International Conference on Microelectronic Test Structures
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780343484
9780780343481
DOI:10.1109/ICMTS.1998.688066