مؤتمر
Characterization and application of interconnect process parameters
العنوان: | Characterization and application of interconnect process parameters |
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المؤلفون: | Chou, A., Chang, K.-J., Mathews, R., Wong, K., Wang, T., Wei, Y.-H., Su, K.C., Hsue, P. |
المصدر: | ICMTS 1998. Proceedings of 1998 International Conference on Microelectronic Test Structures (Cat. No.98CH36157) Microelectronic test structures Microelectronic Test Structures, 1998. ICMTS 1998., Proceedings of the 1998 International Conference on. :189-191 1998 |
Relation: | ICMTS 1998. Proceedings of 1998 International Conference on Microelectronic Test Structures |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 0780343484 9780780343481 |
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DOI: | 10.1109/ICMTS.1998.688066 |