مؤتمر
Simple Gate Metal Anneal (SIGMA) stack for FinFET Replacement Metal Gate toward 14nm and beyond
| العنوان: | Simple Gate Metal Anneal (SIGMA) stack for FinFET Replacement Metal Gate toward 14nm and beyond |
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| المؤلفون: | Ando, T., Kannan, B., Kwon, U., Lai, W. L., Linder, B. P., Cartier, E. A., Haight, R., Copel, M., Bruley, J., Krishnan, S. A., Narayanan, V. |
| المصدر: | 2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical Papers VLSI Technology (VLSI-Technology): Digest of Technical Papers, 2014 Symposium on. :1-2 Jun, 2014 |
| Relation: | 2014 IEEE Symposium on VLSI Technology |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781479933310 9781479933303 9781479933327 |
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| تدمد: | 07431562 21589682 |
| DOI: | 10.1109/VLSIT.2014.6894358 |