مؤتمر
A novel MEMS gas sensor based on ultrasonic resonance cavity
العنوان: | A novel MEMS gas sensor based on ultrasonic resonance cavity |
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المؤلفون: | Koppinen, P. J., Sillanpaa, T., Karkkainen, A., Saarilahti, J., Seppa, H. |
المصدر: | 2014 IEEE International Ultrasonics Symposium Ultrasonics Symposium (IUS), 2014 IEEE International. :655-658 Sep, 2014 |
Relation: | 2014 IEEE International Ultrasonics Symposium (IUS) |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 9781479970490 9781479970483 |
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تدمد: | 10510117 |
DOI: | 10.1109/ULTSYM.2014.0161 |