مؤتمر
A novel MEMS gas sensor based on ultrasonic resonance cavity
| العنوان: | A novel MEMS gas sensor based on ultrasonic resonance cavity |
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| المؤلفون: | Koppinen, P. J., Sillanpaa, T., Karkkainen, A., Saarilahti, J., Seppa, H. |
| المصدر: | 2014 IEEE International Ultrasonics Symposium Ultrasonics Symposium (IUS), 2014 IEEE International. :655-658 Sep, 2014 |
| Relation: | 2014 IEEE International Ultrasonics Symposium (IUS) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781479970490 9781479970483 |
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| تدمد: | 10510117 |
| DOI: | 10.1109/ULTSYM.2014.0161 |