Advanced TCAD for predictive FinFETs Vth mismatch using full 3D process/device simulation

التفاصيل البيبلوغرافية
العنوان: Advanced TCAD for predictive FinFETs Vth mismatch using full 3D process/device simulation
المؤلفون: Bazizi, E. M, Zaka, A., Herrmann, T., Benistant, F., Tin, J. H. M., Goh, J. P., Jiang, L., Joshi, M., van Meer, H., Korablev, K.
المصدر: 2014 44th European Solid State Device Research Conference (ESSDERC) Solid State Device Research Conference (ESSDERC), 2014 44th European. :341-344 Sep, 2014
Relation: ESSDERC 2014 - 44th European Solid State Device Research Conference
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781479943784
9781479943760
تدمد:19308876
23786558
DOI:10.1109/ESSDERC.2014.6948830