دورية أكاديمية
Differentially piezoresistive transduction of high-q encapsulated SOI-MEMS resonators with sub-100 nm gaps
| العنوان: | Differentially piezoresistive transduction of high-q encapsulated SOI-MEMS resonators with sub-100 nm gaps |
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| المؤلفون: | Li, C.-S., Li, M.-H., Li, S.-S. |
| المصدر: | IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control IEEE Trans. Ultrason., Ferroelect., Freq. Contr. Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on. 62(1):220-229 Jan, 2015 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 08853010 15258955 |
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| DOI: | 10.1109/TUFFC.2014.006470 |