Study of MEMS microcantilever based on their geometric parameters

التفاصيل البيبلوغرافية
العنوان: Study of MEMS microcantilever based on their geometric parameters
المؤلفون: Saha, Semonti, Topkar, Anita, Rathod, S. S.
المصدر: 2014 IEEE International Conference on Advanced Communications, Control and Computing Technologies Advanced Communication Control and Computing Technologies (ICACCCT), 2014 International Conference on. :163-167 May, 2014
Relation: 2014 International Conference on Advanced Communication, Control and Computing Technologies (ICACCCT)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781479939138
9781479939145
DOI:10.1109/ICACCCT.2014.7019391