مؤتمر
A sampling decision system for semiconductor manufacturing - relying on virtual metrology and actual measurements
| العنوان: | A sampling decision system for semiconductor manufacturing - relying on virtual metrology and actual measurements |
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| المؤلفون: | Kurz, Daniel, Pilz, Jurgen, Schirru, Andrea, Pampuri, Simone, De Luca, Cristina |
| المصدر: | Proceedings of the Winter Simulation Conference 2014 Simulation Conference (WSC), 2014 Winter. :2649-2660 Dec, 2014 |
| Relation: | 2014 Winter Simulation Conference - (WSC 2014) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781479974849 9781479974863 |
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| تدمد: | 08917736 15584305 |
| DOI: | 10.1109/WSC.2014.7020109 |