مؤتمر
A sampling decision system for semiconductor manufacturing - relying on virtual metrology and actual measurements
العنوان: | A sampling decision system for semiconductor manufacturing - relying on virtual metrology and actual measurements |
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المؤلفون: | Kurz, Daniel, Pilz, Jurgen, Schirru, Andrea, Pampuri, Simone, De Luca, Cristina |
المصدر: | Proceedings of the Winter Simulation Conference 2014 Simulation Conference (WSC), 2014 Winter. :2649-2660 Dec, 2014 |
Relation: | 2014 Winter Simulation Conference - (WSC 2014) |
قاعدة البيانات: | IEEE Xplore Digital Library |
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