Thickness dependency of adhesion properties of TiW thin films

التفاصيل البيبلوغرافية
العنوان: Thickness dependency of adhesion properties of TiW thin films
المؤلفون: Roshangias, A., Pelzer, R., Khatibi, G., Steinbrenner, J.
المصدر: 2014 IEEE 16th Electronics Packaging Technology Conference (EPTC) Electronics Packaging Technology Conference (EPTC), 2014 IEEE 16th. :192-195 Dec, 2014
Relation: 2014 IEEE 16th Electronics Packaging Technology Conference (EPTC)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781479969944
DOI:10.1109/EPTC.2014.7028417