مؤتمر
Design, simulation and fabrication of MEMS Lorentz force sensor
| العنوان: | Design, simulation and fabrication of MEMS Lorentz force sensor |
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| المؤلفون: | Sue, Chung-Yang, Chiu, Sheng-Ren, Tsai, Chun-Yin, Chen, Shi, Kuo, Chin-Fu, Lee, Tzung-Ching, Hsiao, Chieh-Ling |
| المصدر: | 2014 9th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT) Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT), 2014 9th International. :414-417 Oct, 2014 |
| Relation: | 2014 9th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781479977277 |
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| تدمد: | 21505934 21505942 |
| DOI: | 10.1109/IMPACT.2014.7048430 |