Parametric drive of a toroidal MEMS rate integrating gyroscope demonstrating < 20 PPM scale factor stability

التفاصيل البيبلوغرافية
العنوان:	Parametric drive of a toroidal MEMS rate integrating gyroscope demonstrating < 20 PPM scale factor stability
المؤلفون:	Senkal, D., Ng, E.J., Hong, V., Yang, Y., Ahn, C.H., Kenny, T.W., Shkel, A.M.
المصدر:	2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on. :29-32 Jan, 2015
Relation:	2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
قاعدة البيانات:	IEEE Xplore Digital Library