Tunneling piezoresistive tactile sensing array fabricated by a novel fabrication process with membrane filters

التفاصيل البيبلوغرافية
العنوان: Tunneling piezoresistive tactile sensing array fabricated by a novel fabrication process with membrane filters
المؤلفون: Ma, Cheng-Wen, Lin, Ting-Hao, Yang, Yao-Joe
المصدر: 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on. :249-252 Jan, 2015
Relation: 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781479979554
تدمد:10846999
DOI:10.1109/MEMSYS.2015.7050935