مؤتمر
Feasibility study of a MEMS microphone design using the PolyMUMPs process
| العنوان: | Feasibility study of a MEMS microphone design using the PolyMUMPs process |
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| المؤلفون: | Grixti, Ryan, Grech, Ivan, Casha, Owen, Darmanin, Jean Marie, Gatt, Edward, Micallef, Joseph |
| المصدر: | 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2014 Symposium on. :1-4 Apr, 2014 |
| Relation: | 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9782355000287 9782355000294 9782355000270 |
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| DOI: | 10.1109/DTIP.2014.7056647 |