التفاصيل البيبلوغرافية
العنوان: |
Quality factor and resonant frequency measurement by ARMA process identification of randomly excited MEMS/NEMS cantilever |
المؤلفون: |
Jozwiak, Grzegorz, Kopiec, Daniel, Majstrzyk, Wojciech, Gotszalk, Teodor, Grabiec, Piotr |
المصدر: |
2014 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2014 International Conference on. :151-154 Oct, 2014 |
Relation: |
2014 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) |
قاعدة البيانات: |
IEEE Xplore Digital Library |