Quality factor and resonant frequency measurement by ARMA process identification of randomly excited MEMS/NEMS cantilever

التفاصيل البيبلوغرافية
العنوان: Quality factor and resonant frequency measurement by ARMA process identification of randomly excited MEMS/NEMS cantilever
المؤلفون: Jozwiak, Grzegorz, Kopiec, Daniel, Majstrzyk, Wojciech, Gotszalk, Teodor, Grabiec, Piotr
المصدر: 2014 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2014 International Conference on. :151-154 Oct, 2014
Relation: 2014 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781479979233
DOI:10.1109/3M-NANO.2014.7057324