مؤتمر
Novel sheet resistance measurement on AlGaN/GaN HEMT wafer adapted from four-point probe technique
العنوان: | Novel sheet resistance measurement on AlGaN/GaN HEMT wafer adapted from four-point probe technique |
---|---|
المؤلفون: | Lehmann, J., Leroux, C., Reimbold, G., Charles, M., Torres, A., Morvan, E., Baines, Y., Ghibaudo, G., Bano, E. |
المصدر: | Proceedings of the 2015 International Conference on Microelectronic Test Structures Microelectronic Test Structures (ICMTS), 2015 International Conference on. :163-168 Mar, 2015 |
Relation: | 2015 International Conference on Microelectronic Test Structures (ICMTS) |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 9781479983025 9781479983049 |
---|---|
تدمد: | 10719032 21581029 |
DOI: | 10.1109/ICMTS.2015.7106134 |