Low-temperature and low pressure copper-to-copper direct bonding enabled by creep on highly (111)-oriented Cu surfaces

التفاصيل البيبلوغرافية
العنوان: Low-temperature and low pressure copper-to-copper direct bonding enabled by creep on highly (111)-oriented Cu surfaces
المؤلفون: Chih-Han Tseng, Liu, Chien-Min, Lin, Han-wen, Yi-Cheng Chu, Chen, Chih, Dian-Rong Lyu, Chen, Kuan-Neng, Tu, K. N.
المصدر: 2015 International Conference on Electronics Packaging and iMAPS All Asia Conference (ICEP-IAAC) Electronics Packaging and iMAPS All Asia Conference (ICEP-IACC), 2015 International Conference on. :523-526 Apr, 2015
Relation: 2015 International Conference on Electronics Packaging and iMAPS All Asia Conference (ICEP-IAAC)
قاعدة البيانات: IEEE Xplore Digital Library