مؤتمر
Electrical evaluation of dry etching damage on the side wall of mesa structure
| العنوان: | Electrical evaluation of dry etching damage on the side wall of mesa structure |
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| المؤلفون: | Yamamoto, N., Mawatari, H., Kishi, K. |
| المصدر: | Conference Proceedings. 1998 International Conference on Indium Phosphide and Related Materials (Cat. No.98CH36129) Indium phosphide and related materials Indium Phosphide and Related Materials, 1998 International Conference on. :467-470 1998 |
| Relation: | Conference Proceedings. 1998 International Conference on Indium Phosphide and Related Materials |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780342208 9780780342200 |
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| تدمد: | 10928669 |
| DOI: | 10.1109/ICIPRM.1998.712527 |