التفاصيل البيبلوغرافية
| العنوان: |
The study of compensative structure assisted convex and concave corner structures etching by inductively coupled plasma-reactive ion etch (ICP-RIE) |
| المؤلفون: |
Yu-Hsin Lin, Yuan-Chieh Cheng, Nien-Nan Chu, Wensyang Hsu, Yu-Hsiang Tang, Po-Li Chen, Chih-Chung Yang, Ming-Hua Hsiao, Chien-Nan Hsiao |
| المصدر: |
10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems Nano/Micro Engineered and Molecular Systems (NEMS), 2015 IEEE 10th International Conference on. :491-493 Apr, 2015 |
| Relation: |
2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
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