Long-term evaluation of a non-hermetic micropackage technology for MEMS-based, implantable pressure sensors

التفاصيل البيبلوغرافية
العنوان: Long-term evaluation of a non-hermetic micropackage technology for MEMS-based, implantable pressure sensors
المؤلفون: Wang, P., Majerus, S.J.A., Karam, R., Hanzlicek, B., Lin, D.L., Zhu, H., Anderson, J.M., Damaser, M.S., Zorman, C.A., Ko, W.H.
المصدر: 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on. :484-487 Jun, 2015
Relation: TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781479989553
تدمد:2159547X
21641641
DOI:10.1109/TRANSDUCERS.2015.7180966