التفاصيل البيبلوغرافية
العنوان: |
Design and electro-thermal analysis of micro hotplates for chemical sensors using standard multi user MEMS process |
المؤلفون: |
Girija, K. G., Kaur, Damanjeet, Belwanshi, Vinod, Mehta, Jyoti, Vatsa, R. K., Topkar, Anita |
المصدر: |
2015 2nd International Symposium on Physics and Technology of Sensors (ISPTS) Physics and Technology of Sensors (ISPTS), 2015 2nd International Symposium on. :27-29 Mar, 2015 |
Relation: |
2015 2nd International Symposium on Physics and Technology of Sensors (ISPTS) |
قاعدة البيانات: |
IEEE Xplore Digital Library |