Design and electro-thermal analysis of micro hotplates for chemical sensors using standard multi user MEMS process

التفاصيل البيبلوغرافية
العنوان: Design and electro-thermal analysis of micro hotplates for chemical sensors using standard multi user MEMS process
المؤلفون: Girija, K. G., Kaur, Damanjeet, Belwanshi, Vinod, Mehta, Jyoti, Vatsa, R. K., Topkar, Anita
المصدر: 2015 2nd International Symposium on Physics and Technology of Sensors (ISPTS) Physics and Technology of Sensors (ISPTS), 2015 2nd International Symposium on. :27-29 Mar, 2015
Relation: 2015 2nd International Symposium on Physics and Technology of Sensors (ISPTS)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781467380188
DOI:10.1109/ISPTS.2015.7220075