Effect of post deposition annealing temperature of e-beam evaporated Ta2O5 films on sensitivities of electrolyte-insulator-semiconductor devices

التفاصيل البيبلوغرافية
العنوان: Effect of post deposition annealing temperature of e-beam evaporated Ta2O5 films on sensitivities of electrolyte-insulator-semiconductor devices
المؤلفون: Kumar, Narendra, Tiwari, Abhay Prakash, Kumar, Jitendra, Panda, Siddhartha
المصدر: 2015 2nd International Symposium on Physics and Technology of Sensors (ISPTS) Physics and Technology of Sensors (ISPTS), 2015 2nd International Symposium on. :214-218 Mar, 2015
Relation: 2015 2nd International Symposium on Physics and Technology of Sensors (ISPTS)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781467380188
DOI:10.1109/ISPTS.2015.7220115