Localized Random Telegraphic Noise Study in HfO2 dielectric stacks using Scanning Tunneling Microscopy — Analysis of process and stress-induced traps

التفاصيل البيبلوغرافية
العنوان: Localized Random Telegraphic Noise Study in HfO2 dielectric stacks using Scanning Tunneling Microscopy — Analysis of process and stress-induced traps
المؤلفون: Ranjan, A., Shubhakar, K., Raghavan, N., Thamankar, R., Bosman, M., O'Shea, S. J., Pey, K. L.
المصدر: 2015 IEEE 22nd International Symposium on the Physical and Failure Analysis of Integrated Circuits Physical and Failure Analysis of Integrated Circuits (IPFA), 2015 IEEE 22nd International Symposium on the. :458-462 Jun, 2015
Relation: 2015 IEEE 22nd International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781479999286
تدمد:19461542
19461550
DOI:10.1109/IPFA.2015.7224356