مؤتمر
Characterization of plasma induced damage using transient current measurements
| العنوان: | Characterization of plasma induced damage using transient current measurements |
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| المؤلفون: | Balasinski, A., Petti, C., Bamnolker, H., Ramkumar, K., Chung, A. |
| المصدر: | 1998 3rd International Symposium on Plasma Process-Induced Damage (Cat. No.98EX100) Plasma process-induced damage Plasma Process-Induced Damage, 1998 3rd International Symposium on. :26-29 1998 |
| Relation: | 1998 3rd International Symposium on Plasma Process-Induced Damage |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0965157725 9780965157728 |
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| DOI: | 10.1109/PPID.1998.725566 |