دورية أكاديمية
Sidewall Adhesion Evolution in Epitaxial Polysilicon as a Function of Impact Kinetic Energy and Stopper Area
| العنوان: | Sidewall Adhesion Evolution in Epitaxial Polysilicon as a Function of Impact Kinetic Energy and Stopper Area |
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| المؤلفون: | Dellea, S., Ardito, R., De Masi, B., Tocchio, A., Rizzini, F., Langfelder, G. |
| المصدر: | Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 25(1):134-143 Feb, 2016 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 10577157 19410158 |
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| DOI: | 10.1109/JMEMS.2015.2490481 |