Management of multiple-pass constraints [IC fabrication]

التفاصيل البيبلوغرافية
العنوان: Management of multiple-pass constraints [IC fabrication]
المؤلفون: Bonal, J., Sadai, A., Ortega, C., Aparicio, S., Fernandez, M., Oliva, R., Rodriguez, L., Rosendo, M., Sanchez, A., Paule, E., Ojeda, D.
المصدر: IEEE/SEMI 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (Cat. No.98CH36168) Semiconductor manufacturing Advanced Semiconductor Manufacturing Conference and Workshop, 1998. 1998 IEEE/SEMI. :451-454 1998
Relation: IEEE/SEMI. 1998 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780343808
9780780343801
تدمد:10788743
DOI:10.1109/ASMC.1998.731645