مؤتمر
Full 3D reciprocal space map of thin polycrystalline films for microelectronic applications
| العنوان: | Full 3D reciprocal space map of thin polycrystalline films for microelectronic applications |
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| المؤلفون: | Thanh, T. Nguyen, Blanc, N., Boudet, N., Bourjot, E., Zhiou, S., Kovacova, V., Rodriguez, P., Nemouchi, F., Gergaud, P. |
| المصدر: | 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM) Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM), 2015 IEEE International. :53-56 May, 2015 |
| Relation: | 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781467373562 9781467373555 |
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| تدمد: | 2380632X 23806338 |
| DOI: | 10.1109/IITC-MAM.2015.7325624 |