مؤتمر
Impact of UV wavelength and curing time on the properties of spin-coated low-k films
| العنوان: | Impact of UV wavelength and curing time on the properties of spin-coated low-k films |
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| المؤلفون: | Redzheb, M., Prager, L., Krishtab, M., Armini, S., Vanstreels, K., Franquet, Alexis, Van Der Voort, P., Baklanov, M.R. |
| المصدر: | 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM) Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM), 2015 IEEE International. :99-102 May, 2015 |
| Relation: | 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781467373562 9781467373555 |
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| تدمد: | 2380632X 23806338 |
| DOI: | 10.1109/IITC-MAM.2015.7325641 |