مؤتمر
Improvement in dissolution contrast of positive-tone photo-definable poly(benzoxazole) materials
العنوان: | Improvement in dissolution contrast of positive-tone photo-definable poly(benzoxazole) materials |
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المؤلفون: | Matsukawa, Daisaku, Yoshizawa, Atsutaro, Enomoto, Tetsuya, Mizuno, Kohei, Matsuie, Noritaka, Ohe, Masayuki |
المصدر: | 2015 IEEE CPMT Symposium Japan (ICSJ) CPMT Symposium Japan (ICSJ), 2015 IEEE. :12-15 Nov, 2015 |
Relation: | 2015 IEEE CPMT Symposium Japan (ICSJ) |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 9781479988143 9781479988136 9781479988150 |
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DOI: | 10.1109/ICSJ.2015.7357347 |