Improvement in dissolution contrast of positive-tone photo-definable poly(benzoxazole) materials

التفاصيل البيبلوغرافية
العنوان: Improvement in dissolution contrast of positive-tone photo-definable poly(benzoxazole) materials
المؤلفون: Matsukawa, Daisaku, Yoshizawa, Atsutaro, Enomoto, Tetsuya, Mizuno, Kohei, Matsuie, Noritaka, Ohe, Masayuki
المصدر: 2015 IEEE CPMT Symposium Japan (ICSJ) CPMT Symposium Japan (ICSJ), 2015 IEEE. :12-15 Nov, 2015
Relation: 2015 IEEE CPMT Symposium Japan (ICSJ)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781479988143
9781479988136
9781479988150
DOI:10.1109/ICSJ.2015.7357347