مؤتمر
Temperature robustness design for double-clamped MEMS sensors based on two orthogonal stress-immunity structure
| العنوان: | Temperature robustness design for double-clamped MEMS sensors based on two orthogonal stress-immunity structure |
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| المؤلفون: | Wang, Xinghua, Xiao, Dingbang, Hou, Zhanqiang, Li, Qingsong, Chen, Zhihua, Wu, Xuezhong |
| المصدر: | 2015 IEEE SENSORS SENSORS, 2015 IEEE. :1-4 Nov, 2015 |
| Relation: | 2015 IEEE SENSORS |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781479982035 9781479982028 |
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| DOI: | 10.1109/ICSENS.2015.7370240 |