دورية أكاديمية
Effects of different tungsten polycide process on the effective channel length and performance of deep submicron CMOS transistors
| العنوان: | Effects of different tungsten polycide process on the effective channel length and performance of deep submicron CMOS transistors |
|---|---|
| المؤلفون: | Kuo-Ching Huang, Yean-Kuen Fang, Dun-Nian Yaung, Chii-Wen Chen, Mong-Song Liang, Jang-Cheng Hsieh, Chi-Wen Su, Kuei-Ying Lee |
| المصدر: | IEEE Electron Device Letters IEEE Electron Device Lett. Electron Device Letters, IEEE. 20(1):36-38 Jan, 1999 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 07413106 15580563 |
|---|---|
| DOI: | 10.1109/55.737566 |