مؤتمر
Fabrication of metal grating by holographic lithography system
| العنوان: | Fabrication of metal grating by holographic lithography system |
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| المؤلفون: | Zhuang, Yunyi, Ye, Zhen, Gao, Zhanqi, Zhang, Siyuan, Hao, Yongqin, Feng, Yuan, Li, Zaijin, Wang, Yong, Zhenfu, Ma |
| المصدر: | 2015 International Conference on Optoelectronics and Microelectronics (ICOM) Optoelectronics and Microelectronics (ICOM), 2015 International Conference on. :341-344 Jul, 2015 |
| Relation: | 2015 International Conference on Optoelectronics and Microelectronics (ICOM) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781467374613 9781467374620 |
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| DOI: | 10.1109/ICoOM.2015.7398838 |