مؤتمر
Direct write grayscale lithography for arbitrary shaped micro-optical surfaces
العنوان: | Direct write grayscale lithography for arbitrary shaped micro-optical surfaces |
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المؤلفون: | Eckstein, H.-C., Stumpf, M., Schleicher, P., Kleinle, S., Matthes, A., Zeitner, U.D., Brauer, A. |
المصدر: | 2015 20th Microoptics Conference (MOC) Microoptics Conference (MOC), 2015 20th. :1-2 Oct, 2015 |
Relation: | 2015 20th Microoptics Conference (MOC) |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 9784863484870 9784863484863 |
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DOI: | 10.1109/MOC.2015.7416504 |