Direct write grayscale lithography for arbitrary shaped micro-optical surfaces

التفاصيل البيبلوغرافية
العنوان: Direct write grayscale lithography for arbitrary shaped micro-optical surfaces
المؤلفون: Eckstein, H.-C., Stumpf, M., Schleicher, P., Kleinle, S., Matthes, A., Zeitner, U.D., Brauer, A.
المصدر: 2015 20th Microoptics Conference (MOC) Microoptics Conference (MOC), 2015 20th. :1-2 Oct, 2015
Relation: 2015 20th Microoptics Conference (MOC)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9784863484870
9784863484863
DOI:10.1109/MOC.2015.7416504