مؤتمر
A nanomachined torque sensor with ultrahigh sensitivity
| العنوان: | A nanomachined torque sensor with ultrahigh sensitivity |
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| المؤلفون: | Huang, Jian Guo, Cat, Hong, Gu, Yuan Dong, Dong, Bin, Song, Jun Feng, Yang, Zhen Chuan, Jin, Yu Feng, Hao, Yu Long, Wu, Jiu Hui, Chen, Tian Ning, Kwong, Dim-Lee., Liu, Ai Qun |
| المصدر: | 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2016 IEEE 29th International Conference on. :858-861 Jan, 2016 |
| Relation: | 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781509019731 9781509019724 |
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| DOI: | 10.1109/MEMSYS.2016.7421765 |