Thermo-mechanical simulation to optimize the integration of a BST stacked MIMIM capacitor

التفاصيل البيبلوغرافية
العنوان: Thermo-mechanical simulation to optimize the integration of a BST stacked MIMIM capacitor
المؤلفون: Gardes, P., Roqueta, F., Diatta, M., Martinez, P., Lauron, F., Bouyssou, E., Poveda, P.
المصدر: 2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2016 17th International Conference on. :1-8 Apr, 2016
Relation: 2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781509021062
9781509021208
DOI:10.1109/EuroSimE.2016.7463298