A study of dry stiction phenomenon in MEMS using a computational stochastic multi-scale methodology

التفاصيل البيبلوغرافية
العنوان: A study of dry stiction phenomenon in MEMS using a computational stochastic multi-scale methodology
المؤلفون: Hoang, T.-V., Wu, L., Paquay, S., Golinval, J.-C., Arnst, M., Noels, L.
المصدر: 2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2016 17th International Conference on. :1-4 Apr, 2016
Relation: 2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9781509021062
9781509021208
DOI:10.1109/EuroSimE.2016.7463333