مؤتمر
The characteristics of EPI-SI thin film in electron cyclotron resonance plasma examined by an integrated plasma diagnostic sub-system
| العنوان: | The characteristics of EPI-SI thin film in electron cyclotron resonance plasma examined by an integrated plasma diagnostic sub-system |
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| المؤلفون: | Jou, S. K., Hu, L. C., Yang, C. R., Lin, Y. W., Wang, C. J., Wei, T. C., Lee, C. C., Chang, J. Y., Chen, I. C., Li, Tomi T. |
| المصدر: | 2016 China Semiconductor Technology International Conference (CSTIC) Semiconductor Technology International Conference (CSTIC), 2016 China. :1-3 Mar, 2016 |
| Relation: | 2016 China Semiconductor Technology International Conference (CSTIC) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9781467388047 9781467388030 |
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| DOI: | 10.1109/CSTIC.2016.7464020 |