التفاصيل البيبلوغرافية
العنوان: |
Recent developments on PULSION® PIII tool: FinFET 3D doping, high temp implantation, III-V doping, contact and silicide improvement, & 450 mm |
المؤلفون: |
Torregrosa, Frank, Spiegel, Yohann, Duchaine, Julien, Michel, Thomas, Borvon, Gael, Roux, Laurent |
المصدر: |
2015 15th International Workshop on Junction Technology (IWJT) Junction Technology (IWJT), 2015 15th International Workshop on. :1-5 Jun, 2015 |
Relation: |
2015 15th International Workshop on Junction Technology (IWJT) |
قاعدة البيانات: |
IEEE Xplore Digital Library |